Research of detecting technique of micro differential capacitance 微小差分电容检测技术的研究
High - precision differential capacitance detecting circuit for mems acceleration sensors 高灵敏度差分电容检测电路的研究
The structure of the micro differential capacitance is optimized by use of the ansys software . 3 . when sih4 reacts with nh3 in a plasma - enhanced chemical vapor deposition ( pecvd ) equipment , a thin film of si3n4 is deposited on the si film 2 .研究了微电容式压力传感器的差动电容结构设计和微谐振式压力传感器的微谐振子结构设计,利用ansys软件对微差动电容的结构进行了优化设计。
Differential capacitance in physics, electronics, and electrochemistry is a measure of the voltage-dependent capacitance of a nonlinear capacitor, such as an electrical double layer or a semiconductor diode. It is defined as the derivative of charge with respect to potential.